Title
Comparisons of anchor designs for MEMS resonant mass sensors
Document Type
Conference Proceeding
Date of Publication
2008
Publication Title
Proceedings of the ASPE Annual Meeting
First Page
2775
Recommended Citation
Li, C. and Miller, M. H., "Comparisons of anchor designs for MEMS resonant mass sensors" (2008). Engineering, School of . 186.
https://cufind.campbell.edu/engineering/186
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