Title
Simple models for piston type micromirror behavior
Document Type
Article
Date of Publication
1-9-2006
Publication Title
Journal of Micromechanics and Microengineering
First Page
303
Last Page
313
DOI
https://iopscience.iop.org/article/10.1088/0960-1317/16/2/015
Recommended Citation
Miller, M. H.; Perrault, J. A.; Parker, G. G.; Bettig, B. P.; and Bifano, T. G., "Simple models for piston type micromirror behavior" (2006). Engineering, School of . 308.
https://cufind.campbell.edu/engineering/308
COinS
