Title
MEMS spatial light modulator with integrated electronics
Document Type
Conference Proceeding
Date of Publication
2003
Event
Proceedings of SPIE
Recommended Citation
Becker, T.; Bifano, T.; Lee, H.; Miller, M. H.; Bierden, P.; and Cornellisen, S., "MEMS spatial light modulator with integrated electronics" (2003). Engineering, School of . 274.
https://cufind.campbell.edu/engineering/274
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