Title
Large-scale metal MEMS mirror arrays with integrated electronics
Document Type
Conference Proceeding
Date of Publication
2002
First Page
467
Last Page
476
Event
Proceedings of SPIE: Design, Test, Integration, and Packaging of MEMS/MOEMS,
Recommended Citation
Bifano, T. G.; Bierden, P.; Cornelissen, S.; Dimas, C.; Lee, H.; Miller, M. H.; and Perreault, J., "Large-scale metal MEMS mirror arrays with integrated electronics" (2002). Engineering, School of . 272.
https://cufind.campbell.edu/engineering/272
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