Title
Investigation of air damping and Q in a MEMS resonant mass sensor
Document Type
Conference Proceeding
Date of Publication
2008
Event
ASPE Annual Meeting
Recommended Citation
Li, C. and Miller, M. H., "Investigation of air damping and Q in a MEMS resonant mass sensor" (2008). Engineering, School of . 266.
https://cufind.campbell.edu/engineering/266
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