Simple models for piston type micromirror behavior

Michele Miller, J. A. Perrault, G. G. Parker, B. P. Bettig, T. G. Bifano

Research output: Contribution to journal › Article › peer-review

Original language	American English
Journal	Journal of Micromechanics and Microengineering
Volume	16
DOIs	https://doi.org/10.1088/0960-1317/16/2/015
State	Published - Jan 9 2006

Disciplines

@article{5bfb004ad708409fa278bfd5c2e8eff3,

title = "Simple models for piston type micromirror behavior",

author = "Michele Miller and Perrault, \{J. A.\} and Parker, \{G. G.\} and Bettig, \{B. P.\} and Bifano, \{T. G.\}",

year = "2006",

month = jan,

day = "9",

doi = "10.1088/0960-1317/16/2/015",

language = "American English",

volume = "16",

journal = "Journal of Micromechanics and Microengineering",

}

TY - JOUR

T1 - Simple models for piston type micromirror behavior

AU - Miller, Michele

AU - Perrault, J. A.

AU - Parker, G. G.

AU - Bettig, B. P.

AU - Bifano, T. G.

PY - 2006/1/9

Y1 - 2006/1/9

UR - https://cufind.campbell.edu/engineering/308

UR - https://iopscience.iop.org/article/10.1088/0960-1317/16/2/015

U2 - 10.1088/0960-1317/16/2/015

DO - 10.1088/0960-1317/16/2/015

M3 - Article

VL - 16

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

ER -