Optimization strategy for resonant mass sensor design in the presence of squeeze film damping

C. Li, Michele Miller

Campbell University

Research output: Contribution to journal › Article › peer-review

Original language	American English
Journal	Micromachines
Volume	1
DOIs	https://doi.org/10.3390/microm1010112
State	Published - Jan 1 2010

Disciplines

Engineering

Access to Document

10.3390/microm1010112License: Unspecified

Optimization strategy for resonant mass sensor design in the presFinal published version, 431 KBLicense: Unspecified

Other files and links

Link to repository

Cite this