MEMS spatial light modulators with integrated electronics

Thomas Becker; Thomas Bifano; Hocheol Lee; Michele Miller; Paul Bierden; Steven Cornelissen

doi:10.1117/12.477931

MEMS spatial light modulators with integrated electronics

Thomas Becker
, Thomas Bifano
, Hocheol Lee
, Michele Miller
, Paul Bierden
, Steven Cornelissen

Boston University
Michigan Technological University
Boston Micromachines Corporation

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Pages (from-to)	248-258
Number of pages	11
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4983
DOIs	https://doi.org/10.1117/12.477931
State	Published - 2003
Externally published	Yes
Event	MOEMS and Miniaturized Systems III - San Jose, CA, United States Duration: Jan 27 2003 → Jan 29 2003

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Keywords

MEMS
Micromirror
Spatial light modulator

Access to Document

10.1117/12.477931

Cite this

@article{71e3e75a76684d859b055360336d9551,

title = "MEMS spatial light modulators with integrated electronics",

keywords = "MEMS, Micromirror, Spatial light modulator",

author = "Thomas Becker and Thomas Bifano and Hocheol Lee and Michele Miller and Paul Bierden and Steven Cornelissen",

year = "2003",

doi = "10.1117/12.477931",

language = "English",

volume = "4983",

pages = "248--258",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

note = "MOEMS and Miniaturized Systems III ; Conference date: 27-01-2003 Through 29-01-2003",

}

TY - JOUR

T1 - MEMS spatial light modulators with integrated electronics

AU - Becker, Thomas

AU - Bifano, Thomas

AU - Lee, Hocheol

AU - Miller, Michele

AU - Bierden, Paul

AU - Cornelissen, Steven

PY - 2003

Y1 - 2003

KW - MEMS

KW - Micromirror

KW - Spatial light modulator

UR - https://www.scopus.com/pages/publications/0038396398

UR - https://www.scopus.com/pages/publications/0038396398#tab=citedBy

U2 - 10.1117/12.477931

DO - 10.1117/12.477931

M3 - Conference article

AN - SCOPUS:0038396398

SN - 0277-786X

VL - 4983

SP - 248

EP - 258

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - MOEMS and Miniaturized Systems III

Y2 - 27 January 2003 through 29 January 2003

ER -

MEMS spatial light modulators with integrated electronics

ASJC Scopus Subject Areas

Keywords

Access to Document

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Cite this