| Original language | American English |
|---|---|
| Journal | Default journal |
| State | Published - Jan 1 2003 |
Disciplines
- Engineering
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MEMS spatial light modulator with integrated electronics
- T. Becker
- , T. Bifano
- , H. Lee
- , Michele Miller
- , P. Bierden
- , S. Cornellisen
Research output: Contribution to journal › Article › peer-review