Large-scale metal MEMS mirror arrays with integrated electronics

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@article{fd7e0bef8f054174b8374c11ff13c860,

title = "Large-scale metal MEMS mirror arrays with integrated electronics",

author = "Bifano, \{T. G.\} and P. Bierden and S. Cornelissen and C. Dimas and H. Lee and Miller, \{M. H.\} and J. Perreault and Michele Miller",

year = "2002",

month = jan,

day = "1",

language = "American English",

journal = "Default journal",

}