Large-scale metal MEMS mirror arrays with integrated electronics

Thomas Bifano; Paul Bierden; Steven Cornelissen; Clara Dimas; Hocheol Lee; Michele Miller; Julie Perreault

doi:10.1117/12.462845

Large-scale metal MEMS mirror arrays with integrated electronics

Thomas Bifano
, Paul Bierden
, Steven Cornelissen
, Clara Dimas
, Hocheol Lee
, Michele Miller
, Julie Perreault

Boston University College of Engineering
Boston Micromachines Corporation
Michigan Technological University

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	467-476
Number of pages	10
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4755
DOIs	https://doi.org/10.1117/12.462845
State	Published - 2002
Externally published	Yes

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.462845

Cite this

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title = "Large-scale metal MEMS mirror arrays with integrated electronics",

author = "Thomas Bifano and Paul Bierden and Steven Cornelissen and Clara Dimas and Hocheol Lee and Michele Miller and Julie Perreault",

year = "2002",

doi = "10.1117/12.462845",

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pages = "467--476",

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T1 - Large-scale metal MEMS mirror arrays with integrated electronics

AU - Bifano, Thomas

AU - Bierden, Paul

AU - Cornelissen, Steven

AU - Dimas, Clara

AU - Lee, Hocheol

AU - Miller, Michele

AU - Perreault, Julie

PY - 2002

Y1 - 2002

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VL - 4755

SP - 467

EP - 476

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

ER -

Large-scale metal MEMS mirror arrays with integrated electronics

ASJC Scopus Subject Areas

Access to Document

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