Optimizing Chemo-Mechanical Structure for MEMS Chemical Vapor Sensor Arrays

  • Miller, Michele (PI)
  • Bergstrom, P. (CoI)
  • Green, S. (CoI)
  • Liu, H. (CoI)
  • Parker, G. (CoI)

Project: Research project

Project Details

StatusFinished
Effective start/end date1/1/07 → 1/1/10

Funding

  • State of Michigan 21st Century Jobs Fund: $808,832.00